DuPont™ Kalrez® 9100
DuPont™ Kalrez® 9100 For PECVD/ALD/HDPCVD & Conductor Etch Applications DuPont™ Kalrez® 9100 is an amber translucent product targeted specifically for PECVD, ALD, HDPCVD and Conductor (Poly/Metal) Etch applications*. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well […]
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