DuPont™ Kalrez® 9600 — High Purity, High Temperature Semiconductor Applications

With the semiconductor industry officially entering India, it is important to understand the ideal FFKM O-ring offerings. Purity is critical to high wafer yield. As a consequence, reducing contamination from particulates, outgassing and extractables caused by seal deterioration are all major goals for semiconductor fabricators. Manufacturers gain seal reliability and process purity when they rely on DuPont™ Kalrez® perfluoroelastomer parts.

DuPont™ Kalrez® 9600

DuPont™ Kalrez® 9600 perfluoroelastomer parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals. In addition to its extremely low erosion rate and weight loss from plasma attacks, this well balanced material provides excellent chemical resistance to Ammonia, Ozone and Water Vapor. Its outstanding resilience in compression and ultra-low outgassing at high temperature conditions makes it especially suitable for applications where purity of the process environment is paramount, such as Plasma-Enhanced Atomic Layer Deposition and Chemical Vapor Deposition processes used in fabricating next generation semiconductor chips. A maximum application temperature of 315°C is suggested. Ultrapure cleaning and packaging are standard for all Kalrez® 9600 parts.

Benefits of DuPont™ Kalrez® 9600 parts:

  • Seal lifetime extended to  more than 3 times the incumbent competitor FFKM, resulting in much higher wafer output.
  • Cleaner seal material resulted in lower chamber contamination, decreased chamber preparation time and overall reduced maintenance cycle time.

To find out more about DuPont™ Kalrez® 9600 parts (available in standard o-rings and custom shapes), contact our engineers today!

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