When Thermal Processes Push Seals to the Limit, Kalrez® Performs!
Thermal processes in semiconductor manufacturing use high temperatures to alter material properties during oxidation, diffusion, deposition, and curing steps. These processes demand sealing solutions that can withstand extreme heat, aggressive chemistries, and ultra-clean environments without failure.
Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. Kalrez® seals are available in standard and custom sized O-rings, as well as customized shapes, that meet the demanding requirements of wafer processing in thermal environments. A proprietary ultraclean process and cleanroom handling is standard for all Kalrez® products utilized in the Semiconductor Industry.
Product Selector for Thermal Processes The following table provides a quick and easy tool for the selection of Kalrez® parts depending on the production process type:
Typical Applications for Thermal Processes:
- Quartz chamber seal
- Fittings
- Center ring
- Low dielectric curing processes
Current Kalrez® Product Offerings for Thermal Application
Kalrez® 8900
Kalrez® 8900 parts are for oxidation, diffusion, ALD, and LPCVD applications. It offers outstanding thermal stability, very low outgassing and excellent (low) compression set properties. Kalrez® 8900 parts exhibit excellent retention of physical properties at elevated temperatures, have excellent mechanical strength and are well-suited for both static and dynamic sealing applications.
Kalrez® 8575
Kalrez® 8575 parts are developed for oxidation, diffusion, lamp anneal and RTP sealing applications. Kalrez® 8575 exhibits excellent thermal stability and long-term sealing performance, less Infrared (IR) absorption and significantly reduced outgassing properties at elevated temperatures. It also has good mechanical properties and is well-suited for both static and low stress/low sealing force applications.
Kalrez® 7075UP
Kalrez® 7075UP parts are targeted specifically metal CVD applications. They offer outstanding thermal stability, very low outgassing and excellent compression set properties. Kalrez® 7075UP exhibits excellent seal force retention, has good mechanical properties and is well suited for both static and dynamic sealing applications. Ultrapure post-cleaning and packaging is standard for all parts made from Kalrez® 7075UP
Kalrez® 9500
Kalrez® 9500 parts are targeted specifically for deposition processes where ozone, ammonia and water vapor are used for processing, e.g. SACVD, FCVD, PECVD curing processes, etc. It has been specifically designed for use in applications where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. Kalrez® 9500 also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications.
Kalrez® 9600
Kalrez® 9600 parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals. It has an extremely low erosion rate and weight loss from plasma attack and provides excellent chemical resistance to Ammonia, Ozone, and Water Vapor. Its outstanding resilience in compression and ultra-low outgassing at high temperature conditions makes it especially suitable for applications where purity is paramount, such as Plasma Enhanced Atomic Layer Deposition and Chemical Vapor Deposition processes.
Typical Physical Properties:
Selecting the right sealing material is critical to maintaining uptime, yield, and process purity in thermal wafer processing.Mascot Systems, in association with Kalrez®, supports semiconductor manufacturers with proven sealing solutions engineered for extreme temperatures, aggressive chemistries, and ultra-clean environments.
Connect with Mascot Systems to identify the right Kalrez® grade for your thermal processes and ensure long-term sealing reliability where it matters most.