Kalrez® 9100: Achieve Superior Sealing in Semicon plasma rich processes.
DuPont™ Kalrez® 9100 for plasma rich manufacturing processes:
Product Description
DuPont™ Kalrez® 9100 is an amber translucent perfluoroelastomer, ideal for resistance to fluorine-based plasma, such as NF3 and F2. It features ultra-low particle generation, minimal weight loss, and excellent thermal stability, compression set, and outgassing properties. Kalrez® 9100 is highly suited for static and dynamic sealing with strong mechanical properties and a maximum continuous service temperature of 300 °C.
DuPont™ Kalrez® 9100 is designed for PECVD, ALD, HDPCVD, and Conductor Etch applications, offering low erosion and ultra-low particle generation in harsh plasma environments. It provides excellent thermal stability, minimal outgassing, strong elastic recovery, and good mechanical strength, making it ideal for static and selective dynamic sealing. Maximum recommended temperature: 300°C (572°F). All Kalrez® 9100 parts come with ultra-pure post-cleaning and packaging.
Features/Benefits
- Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasmas
- Superior resistance to dry process chemistry
- Excellent thermal stability and low outgassing
- Outstanding elastic recovery and low compression set
Suggested Applications
- Gas inlet/orifice seals
- Chamber lid seals
- Isolation valve seals
- Bonded gate/slit valve door seals
Particle Generation
Traditional perfluoroelastomer (FFKM) sealants often contain carbon black or mineral fillers, while newer versions are unfilled or use polymeric fillers. Plasma resistance varies by filler type. High-resistance fillers like BaSO4 or TiO2 can shield polymers, reducing erosion but potentially leaving particles. Unfilled and polymeric-filled products, containing only carbon, fluorine, and oxygen, fully etch to volatiles, minimizing contamination. Kalrez® 9100 shows lower particle generation compared to nano-silica and metallic oxide-filled FFKM products in various plasmas.
Why Fabs Choose Kalrez® 9100
Kalrez® 9100 enhances wafer production in semiconductor processes using oxygen and fluorinated plasmas for cleaning. Fabline evaluations show it offers less erosion, lower particle generation, and longer seal life than competing perfluoroelastomers in both static and dynamic sealing applications.
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