Kalrez® Parts Reduce Wafer Contamination
Kalrez® Parts Reduce Wafer Contamination Kalrez® FFKM Seals Help Minimize Wafer Process Contamination Perfluoroelastomers (FFKMs) are used as seals on wafer processing equipment due to their extraordinary resistance to chemicals, including reactive plasmas and extreme heat as high as 327°C. FFKM performance can vary depending upon the chemical composition. Specially formulated Kalrez® products can help reduce wafer […]
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